Dr. Hendrik Specht
at Bosch Sensortec GmbH
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 9, 2012
Proc. SPIE. 8428, Micro-Optics 2012
KEYWORDS: Reflectors, Fabry–Perot interferometers, Resonators, Metals, Silicon, Reflectivity, Transmittance, Aluminum, Optical filtering, Wafer bonding

PROCEEDINGS ARTICLE | February 9, 2009
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Microelectromechanical systems, Genetic algorithms, Microsystems, Data modeling, Doppler effect, Silicon, Manufacturing, Finite element methods, Deep reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | February 9, 2009
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Mirrors, Cameras, Image processing, Distortion, Laser scanners, Image quality, Projection systems, Micromirrors, 3D scanning, Laser based displays

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