Heng Yang
at Univ of Notre Dame
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Transmittance, Silver, Mirrors, Metals, Silicon, Refractive index, Image sensors, Visible radiation, Quantum efficiency, Palladium

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Electrodes, Capacitance, Microelectromechanical systems, Actuators, Aluminum, Capacitors, Fabry–Perot interferometry, Optical simulations, Finite element methods, Silicon

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