Heng Yang
at Univ of Notre Dame
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Refractive index, Mirrors, Visible radiation, Metals, Silicon, Quantum efficiency, Silver, Image sensors, Transmittance, Palladium

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Microelectromechanical systems, Actuators, Fabry–Perot interferometry, Capacitors, Electrodes, Silicon, Capacitance, Finite element methods, Aluminum, Optical simulations

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