Henk A. Lensen
Project Manager at TNO
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530I (2024) https://doi.org/10.1117/12.3010105
KEYWORDS: Hydrogen, Extreme ultraviolet, Vacuum, Photons, Pellicles, Extreme ultraviolet lithography, X-ray photoelectron spectroscopy, Thin films, Scanning electron microscopy, Chemical analysis

Proceedings Article | 22 November 2023 Poster
Kleopatra Papamichou, Thomas Mechielsen, Aneta Stodólna, Erik Schuring, Henk Lensen
Proceedings Volume PC12750, PC127500R (2023) https://doi.org/10.1117/12.2686862
KEYWORDS: Hydrogen, Plasma, Aluminum, Extreme ultraviolet, X-ray photoelectron spectroscopy, Semiconducting wafers, Chemical composition, Wafer-level optics, Scattering, Printing

Proceedings Article | 22 November 2023 Presentation
Cederik Meekes, Dagmar Wismeijer, Jurjen Emmelkamp, Henk Lensen
Proceedings Volume PC12750, PC1275005 (2023) https://doi.org/10.1117/12.2686732
KEYWORDS: Hydrogen, Plasma, Metals, Modeling, Diffusion, Grain boundaries, Extreme ultraviolet, Alloys, Wafer-level optics, Vacuum

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11854, 1185414 (2021) https://doi.org/10.1117/12.2600928
KEYWORDS: Extreme ultraviolet lithography, Hydrogen, Reticles, Extreme ultraviolet, Plasma, Scanners, EUV optics, Accelerated life testing, Materials analysis, Extreme ultraviolet coatings, Contamination control

Proceedings Article | 4 November 2020 Presentation + Paper
Proceedings Volume 11517, 115170Z (2020) https://doi.org/10.1117/12.2573125
KEYWORDS: Reticles, Extreme ultraviolet lithography, Photomasks, Semiconducting wafers, Ruthenium, Scanners, Contamination, Integrated circuits, Semiconductors, X-rays

Showing 5 of 20 publications
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