Henning T. Katte
Managing Director at Ilis GmbH
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 16, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Refractive index, Polarization, Birefringence, Imaging systems, Glasses, Crystals, Polarizers, Polarimetry, Time metrology, Spatial resolution

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top