Dr. Henrik S. Karlsson
Senior Engineer at Mycronic AB
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Electron beam lithography, Deep ultraviolet, Etching, Manufacturing, Reflectivity, Photomasks, Photoresist processing, Binary data, Standards development

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