Dr. Henrik Sjoeberg Profile

Dr. Henrik Sjoeberg

Director at Mycronic AB

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Author

Publications (15)

Proceedings Article | 20 May 2006 Paper

Sigma7500: an improved DUV laser pattern generator addressing sub-100-nm photomask accuracy and productivity requirements

Henrik Sjöberg, Tord Karlin, Mats Rosling, Thomas Öström, Jonas Måhlén, Tom Newman

Proceedings Volume 6283, 628305 (2006) https://doi.org/10.1117/12.681731

KEYWORDS: Photomasks, Spatial light modulators, Neodymium, Image enhancement, Calibration, Deep ultraviolet, Optical lithography, Raster graphics, CCD cameras, Phase shifting

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Proceedings Article | 16 June 2005 Paper

Second level exposure for advanced phase shift mask applications using the SLM-based Sigma7300 DUV mask writer

Thomas Ostrom, Angela Beyerl, Henrik Sjoberg, Tom Newman, Peter Hogfeldt

Proceedings Volume 5835, (2005) https://doi.org/10.1117/12.637276

KEYWORDS: Photomasks, Optical alignment, Deep ultraviolet, Spatial light modulators, Electron beam lithography, Optical lithography, Overlay metrology, Charge-coupled devices, Quartz, CCD cameras

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Proceedings Article | 22 January 2005 Paper

A high-end mask writer using a spatial light modulator

Ulric Ljungblad, Per Askebjer, Tord Karlin, Tor Sandstrom, Henrik Sjoeberg

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590934

KEYWORDS: Spatial light modulators, Mirrors, Micromirrors, Photomasks, Calibration, Optical alignment, Cameras, CCD cameras, Analog electronics, Reflection

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Proceedings Article | 20 August 2004 Paper

Pattern accuracy and throughput optimization for an SLM-based 248-nm DUV laser mask pattern generator

Henrik Sjoberg, Jean-Michel Chauvet, Jan Harkesjo, Peter Hogfeldt, Andrzej Karawajczyk, Johan Karlsson, Lars Kjellberg, Jonas Mahlen, Angela Beyerl, Jukka Vedenpaa, Robin Goodoree, Mans Bjuggren, Johan Aman

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557805

KEYWORDS: Photomasks, Spatial light modulators, Manufacturing, Deep ultraviolet, Printing, Raster graphics, Laser applications, Lithography, Image processing, Solids

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Proceedings Article | 17 December 2003 Paper

Properties of a 248-nm DUV laser mask pattern generator for the 90-nm and 65-nm technology nodes

Johan Aman, Hans Fosshaug, Tobias Hedqvist, Jan Harkesjo, Peter Hogfeldt, Marie Jacobsson, Andrzej Karawajczyk, Johan Karlsson, Mats Rosling, Henrik Sjoberg

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.519970

KEYWORDS: Spatial light modulators, Deep ultraviolet, Photomasks, Laser applications, Excimer lasers, Electron beams, Optical proximity correction, Coherence imaging, Electronics, Particles

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Proceedings Article | 24 May 2000 Paper

Efficient techniques to implement correlation filters on fast SLMs

Bertrand Noharet, Henrik Sjoeberg, Thomas Buret

Proceedings Volume 4089, (2000) https://doi.org/10.1117/12.386897

KEYWORDS: Spatial light modulators, Image filtering, Computer programming, Binary data, Optical filters, Optical correlators, Phase only filters, Optoelectronics, Multiplexing, Phase shift keying

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Proceedings Article | 9 March 1999 Paper

Comparative study of filtering techniques for binary nonhomogeneous images

Henrik Sjoberg, Francois Goudail, Philippe Refregier

Proceedings Volume 3715, (1999) https://doi.org/10.1117/12.341328

KEYWORDS: Linear filtering, Electronic filtering, Binary data, Nonlinear filtering, Tin, Image filtering, Image processing, Joint transforms, Optical correlators, Phase only filters

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Proceedings Article | 22 May 1998 Paper

Internet remote-controlled optical correlator based on 256 X 256 FLC spatial light modulators

Rolph Hey, Bertrand Noharet, Henrik Sjoeberg

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308928

KEYWORDS: Optical correlators, Internet, Optical pattern recognition, Spatial light modulators, Optical filters, Binary data, Image processing, Image filtering, Optical signal processing, Optoelectronics

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Proceedings Article | 22 May 1998 Paper

New encoding method for correlation filters in joint transform correlators

Bertrand Noharet, Magali Loupias, Rolph Hey, Henrik Sjoeberg

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308924

KEYWORDS: Computer programming, Image filtering, Optical correlators, Spatial light modulators, Phase only filters, Optical filters, Joint transforms, Electronic filtering, Nonlinear filtering, Optimal filtering

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SPIE Journal Paper | 1 April 1998

Compact optical correlator: pre-processing and filter encoding strategies applied to images with varying illumination

Henrik Sjoberg, Bertrand Noharet, Lech Wosinski, Rolph Hey

OE, Vol. 37, Issue 04, (April 1998) https://doi.org/10.1117/12.10.1117/1.602028

KEYWORDS: Image filtering, Spatial light modulators, Optical filters, Optical correlators, Binary data, Computer programming, Phase only filters, Linear filtering, Diffraction, Frame grabbers

Proceedings Article | 23 March 1998 Paper

Comparison of the performance of correlation filters on images with real-world nonoverlapping noise: influence of the target size, illumination, and in-plane rotation distortion

Bertrand Noharet, Rolph Hey, Henrik Sjoberg

Proceedings Volume 3386, (1998) https://doi.org/10.1117/12.304766

KEYWORDS: Image filtering, Target detection, Distortion, Image resolution, Linear filtering, Composites, Tolerancing

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Proceedings Article | 27 March 1997 Paper

Compact portable optical correlator with binary ferroelectric SLMs and optimum filters for disjoint noise applied to varying illumination conditions

Henrik Sjoeberg, Lech Wosinski, Bertrand Noharet

Proceedings Volume 3073, (1997) https://doi.org/10.1117/12.270363

KEYWORDS: Spatial light modulators, Optical correlators, Image filtering, Binary data, Optical filters, Image processing, Cameras, Liquid crystals, Phase only filters, Target detection

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Proceedings Article | 27 December 1996 Paper

Influence of preprocessing on correlation filter design: simulated and experimental considerations

Bertrand Noharet, Henrik Sjoeberg, Lech Wosinski

Proceedings Volume 2969, (1996) https://doi.org/10.1117/12.262611

KEYWORDS: Image filtering, Distortion, Optical correlators, Spatial light modulators, Image processing, Binary data, Optical filters, Tolerancing, Signal to noise ratio, Frame grabbers

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Proceedings Article | 27 December 1996 Paper

Noise as a way of representing clutter: experimental and simulation results

Henrik Sjoeberg, Lech Wosinski, Bertrand Noharet

Proceedings Volume 2969, (1996) https://doi.org/10.1117/12.262609

KEYWORDS: Optical filters, Image filtering, Optical correlators, Spatial light modulators, Computer programming, Pattern recognition, Tolerancing, CCD cameras, Binary data, Diffraction

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SPIE Journal Paper | 1 December 1996

Long-working-distance microscope used for diesel injection spray imaging

Henrik Sjoeberg, Goran Manneberg, Andreas Cronhjort

OE, Vol. 35, Issue 12, (December 1996) https://doi.org/10.1117/12.10.1117/1.601113

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Showing 5 of 15 publications

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