Dr. Henrik Sjoeberg
Director at Mycronic AB
SPIE Involvement:
Author
Publications (15)

PROCEEDINGS ARTICLE | May 20, 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Phase shifting, Optical lithography, Deep ultraviolet, Calibration, CCD cameras, Spatial light modulators, Photomasks, Image enhancement, Raster graphics, Neodymium

PROCEEDINGS ARTICLE | June 16, 2005
Proc. SPIE. 5835, 21st European Mask and Lithography Conference
KEYWORDS: Electron beam lithography, Optical lithography, Deep ultraviolet, Quartz, CCD cameras, Spatial light modulators, Photomasks, Charge-coupled devices, Optical alignment, Overlay metrology

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Mirrors, Reflection, Cameras, Calibration, CCD cameras, Spatial light modulators, Micromirrors, Photomasks, Optical alignment, Analog electronics

PROCEEDINGS ARTICLE | August 20, 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Deep ultraviolet, Image processing, Manufacturing, Laser applications, Printing, Spatial light modulators, Solids, Photomasks, Raster graphics

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Coherence imaging, Electron beams, Electronics, Deep ultraviolet, Particles, Laser applications, Spatial light modulators, Photomasks, Excimer lasers, Optical proximity correction

PROCEEDINGS ARTICLE | May 24, 2000
Proc. SPIE. 4089, Optics in Computing 2000
KEYWORDS: Optical filters, Phase shift keying, Multiplexing, Computer programming, Spatial light modulators, Optoelectronics, Image filtering, Optical correlators, Binary data, Phase only filters

Showing 5 of 15 publications
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