Mr. Henry Carl Herbol
Doctoral Candidate at Cornell Univ
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | October 13, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Extreme ultraviolet, Scattering, Electron beams, Extreme ultraviolet lithography, Photons, Photoresist materials, Ionization, Ellipsometry, Monte Carlo methods, Solid modeling

SPIE Journal Paper | May 15, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Chemical species, Inspection, Computer simulations, Interfaces, Transmission electron microscopy, Modeling and simulation, Waveguides

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Multilayers, Waveguides, Chemical species, Inspection, Computer simulations, Transmission electron microscopy, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Ellipsometry, Lithography, Scattering, Polymers, Photons, Photoresist materials, Monte Carlo methods, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Multilayers, Finite-difference time-domain method, Chemical species, Inspection, Atomic force microscopy, Transmission electron microscopy, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Particles, Scanning electron microscopy, Detector development, Photomasks, Extreme ultraviolet, Compound parabolic concentrators, Extreme ultraviolet lithography, Optical proximity correction, Atmospheric particles

Showing 5 of 6 publications
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