Henry H. Kamberian
Distinguished Engineer - Technology Applications
SPIE Involvement:
Conference Program Committee | Author | Science Fair Judge
Publications (16)

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 127510M (2023) https://doi.org/10.1117/12.2689665
KEYWORDS: SRAF, Extreme ultraviolet, Optical lithography, Resolution enhancement technologies, Opacity, Extreme ultraviolet lithography, Optical proximity correction, Line edge roughness, Semiconducting wafers, Printing

Proceedings Article | 21 November 2023 Open Access Presentation + Paper
Mohamed Ramadan, Christopher Progler, Michael Green, Henry Kamberian, Jinju Beineke
Proceedings Volume 12751, 127510I (2023) https://doi.org/10.1117/12.2688168
KEYWORDS: Data modeling, Photomasks, Biomedical applications, Internet of things, Industrial applications, Product engineering, Optical lithography, Medical devices, Manufacturing, Laser applications

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11323, 1132313 (2020) https://doi.org/10.1117/12.2554721

Proceedings Article | 23 March 2020 Presentation + Paper
Michael Green, Romain Lallement, Mohamed Ramadan, Derren Dunn, Henry Kamberian, Stuart Sieg, Young Ham, Chris Progler
Proceedings Volume 11323, 113230Q (2020) https://doi.org/10.1117/12.2560545
KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Scanning electron microscopy, Line edge roughness, Stochastic processes, Optical proximity correction, SRAF, Metals, Lithography

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10957, 109570L (2019) https://doi.org/10.1117/12.2515071
KEYWORDS: Photomasks, Semiconducting wafers, Image processing, Extreme ultraviolet lithography, Electron beam lithography, Stochastic processes, Inspection, Line edge roughness, Extreme ultraviolet, Optical proximity correction

Showing 5 of 16 publications
Conference Committee Involvement (4)
Photomask Technology 2024
29 September 2024 | Monterey, California, United States
Photomask Technology 2023
2 October 2023 | Monterey, California, United States
Photomask Technology 2022
26 September 2022 | Monterey, California, United States
Photomask Technology
27 September 2021 | Online Only, United States
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