Prof. Henry C. Kapteyn
Professor at JILA
SPIE Involvement:
Author
Publications (41)

PROCEEDINGS ARTICLE | April 23, 2018
Proc. SPIE. 10600, Health Monitoring of Structural and Biological Systems XII
KEYWORDS: Metamaterials, Ultrafast phenomena, Near infrared, Diffraction, Spectroscopy, Crystals, Extreme ultraviolet, Thermoelectric materials, Acoustics, Nanolithography

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Ultrafast phenomena, Coherence imaging, Light sources, Metrology, Laser applications, Extreme ultraviolet, Extreme ultraviolet lithography, High harmonic generation, Hollow waveguides

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Coherence imaging, Metrology, Imaging systems, Reflectivity, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Coherence imaging, Cameras, Stereoscopy, Silicon, Reflectivity, Reflectometry, Profiling, 3D metrology, Extreme ultraviolet, 3D image processing

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Thin films, Nanostructures, Diffraction, Coherence imaging, Nanostructuring, Nickel, Silicon, Wave propagation, Extreme ultraviolet, Acoustics

PROCEEDINGS ARTICLE | May 8, 2017
Proc. SPIE. 10193, Ultrafast Bandgap Photonics II
KEYWORDS: Ultrafast phenomena, Scattering, Copper, Nickel, Electrons, Physics, Photonics, Solids, Extreme ultraviolet, Photoemission spectroscopy

Showing 5 of 41 publications
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