Prof. Henry C. Kapteyn
Professor at JILA
SPIE Involvement:
Author
Publications (43)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanoimaging, Extreme ultraviolet

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stereoscopy, Reflectometry, Extreme ultraviolet, 3D image processing

Proceedings Article | 23 April 2018
Proc. SPIE. 10600, Health Monitoring of Structural and Biological Systems XII
KEYWORDS: Metamaterials, Ultrafast phenomena, Near infrared, Diffraction, Spectroscopy, Crystals, Extreme ultraviolet, Thermoelectric materials, Acoustics, Nanolithography

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Ultrafast phenomena, Coherence imaging, Light sources, Metrology, Laser applications, Extreme ultraviolet, Extreme ultraviolet lithography, High harmonic generation, Hollow waveguides

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Coherence imaging, Cameras, Stereoscopy, Silicon, Reflectivity, Reflectometry, Profiling, 3D metrology, Extreme ultraviolet, 3D image processing

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Coherence imaging, Metrology, Imaging systems, Reflectivity, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Showing 5 of 43 publications
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