Prof. Henry C. Kapteyn
Professor at JILA
SPIE Involvement:
Author
Publications (47)

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Ultrafast phenomena, Lithography, Coherence imaging, Spectroscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Photoemission spectroscopy, Time resolved spectroscopy, Radiometry, Semiconducting wafers

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Ultrafast phenomena, Lithography, Mirrors, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, Semiconducting wafers, Yield improvement

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Signal to noise ratio, Metrology, Defect detection, Cameras, Sensors, X-rays, Scatterometry, Extreme ultraviolet, Model-based design, Defect inspection

Proceedings Article | 20 December 2019 Paper
Proc. SPIE. 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Ferromagnetics, Magnetism, Physics

Proceedings Article | 26 March 2019 Presentation
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanoimaging, Extreme ultraviolet

Showing 5 of 47 publications
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