Henry H. Yang
Senior Staff Engineer at Seagate Technology LLC
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | September 13, 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Scanning probe microscopy, Beam propagation method, Contamination, Scanning electron microscopy, Silica, Inspection, Nanoimprint lithography, Hydrogen, Particles, Critical dimension metrology

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Contamination, Silica, Particles, Inspection, Image analysis, Scanning electron microscopy, Nanoimprint lithography, Scanning probe microscopy, Critical dimension metrology, Beam propagation method

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