Dr. Heon J. Choi
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Etching, Printing, Photomasks, Optical proximity correction, Mask making, Critical dimension metrology, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Manufacturing, Photomasks, Optical proximity correction, SRAF, Neodymium, Semiconducting wafers, Resolution enhancement technologies

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