Dr. Herbert L. Engstrom Profile

Dr. Herbert L. Engstrom

President at Tabor Enterprises

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Publications (3)

Proceedings Article | 1 May 1994 Paper

On-line photolithography modeling using spectrophotometry and Prolith/2

Herbert Engstrom, Jeanne Beacham

Proceedings Volume 2196, (1994) https://doi.org/10.1117/12.174147

KEYWORDS: Optical lithography, Spectrophotometry, Photoresist materials, Semiconducting wafers, Semiconductor manufacturing, Thin film manufacturing, Thin films, Manufacturing, Deposition processes, Systems modeling

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Proceedings Article | 1 June 1992 Paper

Measuring thickness of a film deposited onto a multilayer metal surface

Herbert Engstrom

Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59831

KEYWORDS: Refractive index, Reflectivity, Semiconducting wafers, Aluminum, Titanium, Metals, Reflection, Integrated circuits, Metrology, Inspection

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Proceedings Article | 1 July 1991 Paper

Measuring films on and below polycrystalline silicon using reflectometry

Herbert Engstrom, Stanley Stokowski

Proceedings Volume 1464, (1991) https://doi.org/10.1117/12.44467

KEYWORDS: Silicon, Reflectivity, Semiconducting wafers, Silicon films, Reflectometry, Visible radiation, Crystals, Thin films, Refractive index, Ultraviolet radiation

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