Herbert Freimuth, Frithjof von Germar, Ines Frese, Elzbieta Nahrstedt, Michael Küpper, Rainer Schenk, Björn Baser, Johannes Ott, Klaus Drese, Peter Detemple, Theodor Doll
The development of a lab-on-chip system which allows the parallel detection of a variety of different parameters of a water sample is presented. Water analysis typically comprises the determination of around 30 physical and chemical parameters. An even larger number can arise when special contaminations of organic molecules are of interest. A demonstration system has been realised to show the feasibility and performance of an integrated device for the determination of physical quantities like electrical conductivity, light absorption and turbidity. Additionally, chemical quantities like the pH-value and the content of inorganic and organic contaminations are also determined. Two chips of credit card size contain the analytical functions and will be fabricated by injection moulding. First prototypes have been manufactured by milling or precision milling for the optical components.
In recent years a number of micro machining processes have been developed suitable for the realization of industrial process applications, whereby the LIGA technique is considered to be one of the most promising and flexible technologies for the large scale fabrication of three- dimensional microstructure products. LIGA is based on the combination of deep lithography, and electroforming to realize mold inserts with high accuracy for the mass fabrication of microcomponents made from plastic material. The present report deals with the development of micromolding technologies which are applied at IMM. Specifically they are focused on the small dimensions of the molded microstructures, the high aspect ratio, and the demand for sub-micron precision. This includes the technical implementation of molding processes, the production of suitable micro mold inserts, the investigation in simulation software, the screening of polymer materials, ceramics, metallic powders or preceramic polymers and the development of quality qualification systems. The potential of micro molding processes will be demonstrated by presenting a variety of applications like micro gear wheels, micro pumps, micro optical components, splices and connectors, waveguides, optical gratings and components for chemical and biological micro reactors.
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