Dr. Herbert Legall
at Optigraph GmbH
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | September 30, 2013
Proc. SPIE. 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
KEYWORDS: Ultrafast phenomena, Sensors, Spectroscopy, Crystals, X-rays, X-ray sources, Electrons, Pulsed laser operation, Plasma, Absorption

PROCEEDINGS ARTICLE | December 11, 2012
Proc. SPIE. 8678, Short-Wavelength Imaging and Spectroscopy Sources
KEYWORDS: Microscopes, X-rays, X-ray microscopy, Nitrogen, Tomography, Synchrotrons, Spatial resolution, Zone plates, Plasma, Liquids

PROCEEDINGS ARTICLE | September 12, 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: Optical components, Beam splitters, Capillaries, Glasses, Reflectivity, Extreme ultraviolet, Charge-coupled devices, X-ray lasers, Zone plates, Plasma

PROCEEDINGS ARTICLE | August 31, 2005
Proc. SPIE. 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II
KEYWORDS: Reflection, Sensors, Crystals, X-rays, Copper, Spectrometers, Reflectivity, Spectral resolution, Charge-coupled devices, Absorption

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Mirrors, Calibration, Spectroscopy, Laser energy, Reflectometry, Extreme ultraviolet, Charge-coupled devices, Pulsed laser operation, Power meters, Plasma

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Mirrors, Beam splitters, Sensors, Reflectivity, Reflectometry, Extreme ultraviolet, Monochromators, Signal detection, Pulsed laser operation, EUV optics

Showing 5 of 6 publications
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