Prof. Herbert R. Shea
Professor at Ecole Polytechnique Fédérale de Lausanne
SPIE Involvement:
Conference Chair | Conference Program Committee | Conference Co-Chair | Author | Editor | Instructor
Area of Expertise:
Dielectric Elastomer Actuator , Stretchable electrodes , MEMS reliability , MEMS for Space
Websites:
Publications (59)

PROCEEDINGS ARTICLE | March 27, 2018
Proc. SPIE. 10594, Electroactive Polymer Actuators and Devices (EAPAD) XX
KEYWORDS: Dielectric elastomer actuators, Cell mechanics

PROCEEDINGS ARTICLE | March 27, 2018
Proc. SPIE. 10594, Electroactive Polymer Actuators and Devices (EAPAD) XX
KEYWORDS: Actuators, Carbon, Dielectric elastomer actuators, Electrodes, Dielectrics, Resistance, Data acquisition, Printing, Transducers

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10567, International Conference on Space Optics — ICSO 2006
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Optical design, Tunable lasers, Etching, Silicon, Photomasks, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | April 17, 2017
Proc. SPIE. 10163, Electroactive Polymer Actuators and Devices (EAPAD) 2017
KEYWORDS: Fabrication, Actuators, Carbon, Microscopes, Biomedical optics, Dielectric elastomer actuators, Electrodes, Manufacturing, Resistance, Printing, Inkjet technology, Stretchable electrodes

PROCEEDINGS ARTICLE | April 17, 2017
Proc. SPIE. 10163, Electroactive Polymer Actuators and Devices (EAPAD) 2017
KEYWORDS: Actuators, Microscopes, Transparency, Cancer, Dielectric elastomer actuators, Electrodes, Glasses, Microscopy, Luminescence, Silicon, Oxygen, Printing, Biomedical engineering, Plasma, Cell mechanics

PROCEEDINGS ARTICLE | April 15, 2016
Proc. SPIE. 9798, Electroactive Polymer Actuators and Devices (EAPAD) 2016
KEYWORDS: Fabrication, Actuators, Dielectric elastomer actuators, Sensors, Electrodes, Dielectrics, Silicon, Manufacturing, Printing, Chemical elements, Algorithm development, System integration, Dielectric breakdown

Showing 5 of 59 publications
Conference Committee Involvement (9)
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
3 February 2014 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
4 February 2013 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
23 January 2012 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
24 January 2011 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
25 January 2010 | San Francisco, California, United States
Showing 5 of 9 published special sections
Course Instructor
SC434: Designing MEMS for Reliability
This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.
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