Prof. Herbert R. Shea
Professor at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Conference Program Committee | Editor | Author | Instructor
Area of Expertise:
Dielectric Elastomer Actuator , Stretchable electrodes , MEMS reliability , MEMS for Space
Websites:
Publications (71)

Proceedings Article | 28 April 2023 Presentation
Proceedings Volume PC12482, PC1248205 (2023) https://doi.org/10.1117/12.2657910
KEYWORDS: Actuators, Silicon, Electrodes, Haptic technology, Prototyping, Printing, Materials processing, Inkjet technology, Additive manufacturing

Proceedings Article | 28 April 2023 Presentation
Proceedings Volume PC12482, PC124820I (2023) https://doi.org/10.1117/12.2661665
KEYWORDS: Sensors, Metals, Liquids, Electrodes, Silicon, Silicon carbide, Robotics, Optical lithography, Electric field sensors, Capacitors

Proceedings Article | 20 April 2022 Presentation + Paper
Djen Kühnel, Herbert Shea
Proceedings Volume 12042, 120420O (2022) https://doi.org/10.1117/12.2612881
KEYWORDS: Actuators, Gait analysis, Electrodes, Dielectrics, Mobile robots

Proceedings Article | 20 April 2022 Presentation + Paper
Proceedings Volume 12042, 1204206 (2022) https://doi.org/10.1117/12.2611165
KEYWORDS: Reliability, Electrodes, Dielectrics, Carbon, Dielectric elastomer actuators, Humidity, Electrical breakdown, Dielectric breakdown

Proceedings Article | 18 April 2022 Presentation
Proceedings Volume PC12042, PC120420A (2022) https://doi.org/10.1117/12.2615068
KEYWORDS: Actuators, Silicon, Liquids, Dielectrics

Showing 5 of 71 publications
Proceedings Volume Editor (7)

Showing 5 of 7 publications
Conference Committee Involvement (14)
Electroactive Polymer Actuators and Devices (EAPAD) XXVI
25 March 2024 | Long Beach, California, United States
Electroactive Polymer Actuators and Devices (EAPAD) XXV
13 March 2023 | Long Beach, California, United States
Electroactive Polymer Actuators and Devices (EAPAD) XXIV
7 March 2022 | Long Beach, California, United States
Electroactive Polymer Actuators and Devices (EAPAD) XXIII
8 March 2021 | Online Only, California, United States
Electroactive Polymer Actuators and Devices (EAPAD) XXII
27 April 2020 | Online Only, California, United States
Showing 5 of 14 Conference Committees
Course Instructor
SC434: Designing MEMS for Reliability
This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.
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