Prof. Herbert R. Shea
Professor at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Conference Co-Chair | Conference Chair | Conference Program Committee | Author | Editor | Instructor
Area of Expertise:
Dielectric Elastomer Actuator , Stretchable electrodes , MEMS reliability , MEMS for Space
Websites:
Publications (61)

Proceedings Article | 13 March 2019
Proc. SPIE. 10966, Electroactive Polymer Actuators and Devices (EAPAD) XXI
KEYWORDS: Actuators, Dielectric elastomer actuators, Sensors, Electrodes, Power supplies, Capacitance

Proceedings Article | 13 March 2019
Proc. SPIE. 10966, Electroactive Polymer Actuators and Devices (EAPAD) XXI
KEYWORDS: Polyurethane, Dielectric elastomer actuators, Electrodes, Particles, Dielectrics, Power supplies, Finite element methods, Assembly equipment, Dielectric breakdown, Shape memory polymers, Temperature metrology

Proceedings Article | 27 March 2018
Proc. SPIE. 10594, Electroactive Polymer Actuators and Devices (EAPAD) XX
KEYWORDS: Dielectric elastomer actuators, Cell mechanics

Proceedings Article | 27 March 2018
Proc. SPIE. 10594, Electroactive Polymer Actuators and Devices (EAPAD) XX
KEYWORDS: Actuators, Carbon, Dielectric elastomer actuators, Electrodes, Dielectrics, Resistance, Data acquisition, Printing, Transducers

Proceedings Article | 21 November 2017
Proc. SPIE. 10567, International Conference on Space Optics — ICSO 2006
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Optical design, Tunable lasers, Etching, Silicon, Photomasks, Semiconducting wafers, Diffraction gratings

Showing 5 of 61 publications
Conference Committee Involvement (10)
Electroactive Polymer Actuators and Devices (EAPAD) XXII
26 April 2020 | Anaheim, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
3 February 2014 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
4 February 2013 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
23 January 2012 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
24 January 2011 | San Francisco, California, United States
Showing 5 of 10 Conference Committees
Course Instructor
SC434: Designing MEMS for Reliability
This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.
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