Dr. Herman Boerland
at Synopsys Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Metrology, Chromium, Quality measurement, Scanning electron microscopy, Distance measurement, Computed tomography, Optical proximity correction, Critical dimension metrology, Overlay metrology, Edge roughness

PROCEEDINGS ARTICLE | May 28, 2003
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Reticles, Metrology, Deep ultraviolet, Cameras, Inspection, Objectives, Photomasks, Critical dimension metrology, Environmental sensing, Binary data

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top