Dr. Herman Boerland
at Synopsys Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Metrology, Chromium, Quality measurement, Scanning electron microscopy, Distance measurement, Computed tomography, Optical proximity correction, Critical dimension metrology, Overlay metrology, Edge roughness

Proceedings Article | 28 May 2003
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Reticles, Metrology, Deep ultraviolet, Cameras, Inspection, Objectives, Photomasks, Critical dimension metrology, Environmental sensing, Binary data

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