Dr. Herman Heijmerikx Profile

Dr. Herman Heijmerikx

at ASML Netherlands BV

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Author

Publications (3)

Proceedings Article | 22 November 2023 Presentation

Enabling the next step for on-product performance with high-NA EUV system

Kaustuve Bhattacharyya, Diederik de Bruin, Rudy Peeters, Jara Santaclara, Herman Heijmerikx, Rob van ballegoij, Eelco van Setten, Jan van Schoot, Sjoerd Lok, Greet Storms

Proceedings Volume PC12750, PC1275003 (2023) https://doi.org/10.1117/12.2687701

KEYWORDS: Extreme ultraviolet, Imaging systems, Semiconductors, Overlay metrology, Industry

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM

Longfei Shen, Chia Hung Chen, Sheng-Tsung Tsao, Jie Du, Wenkang Song, Hongwei Zhu, Ji-Ling Hou, Sunny Xia, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Kimi Yang, Xing Ma, Zhi-Qiang Tang, Jing Wang, Yu Liu, David Xu, Herman Heijmerikx, Eason Su, Elliott Mc Namara, Kaustuve Bhattacharyya

Proceedings Volume 11611, 116112Z (2021) https://doi.org/10.1117/12.2583818

KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Front end of line, Detection and tracking algorithms

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Proceedings Article | 20 March 2020 Paper

Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility

Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng, Jolly Xu

Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899

KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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