Herman Nicolai
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Light sources, Deep ultraviolet, Scanners, Control systems, Source mask optimization, Critical dimension metrology, Semiconducting wafers, Yield improvement

Proceedings Article | 20 April 2006
Proc. SPIE. 6192, Organic Optoelectronics and Photonics II
KEYWORDS: Gold, Thin films, Light emitting diodes, Organic light emitting diodes, Polymers, Nitrogen, Palladium, Bismuth, Excitons, Electron transport

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