Dr. Hermann Bittner
Director of R&D at KLA MIE GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (17)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Reticles, Edge detection, Metrology, Optical properties, Optical testing, Photomasks, Dysprosium, Phase measurement, Critical dimension metrology, Absorption

Proceedings Article | 28 September 2004
Proc. SPIE. 5489, Ground-based Telescopes
KEYWORDS: Telescopes, Mirrors, Polishing, Sun, Interfaces, Reflectivity, Wavefronts, Reflector telescopes, Optical instrument design, Solar radiation

Proceedings Article | 28 September 2004
Proc. SPIE. 5489, Ground-based Telescopes
KEYWORDS: Infrared imaging, Telescopes, Mirrors, Interfaces, Wavefronts, Optical fabrication, Infrared radiation, Optical alignment, Infrared telescopes, Zerodur

Proceedings Article | 3 March 2003
Proc. SPIE. 4857, Airborne Telescope Systems II
KEYWORDS: Telescopes, Mirrors, Optical fabrication equipment, Interfaces, Manufacturing, Wavefronts, Optical fabrication, Image quality, Integrated optics, Zerodur

Proceedings Article | 3 March 2003
Proc. SPIE. 4857, Airborne Telescope Systems II
KEYWORDS: Optical components, Diffraction, Telescopes, Mirrors, Wavefronts, Distortion, Image quality, Optical simulations, Integrated optics, Optics manufacturing

Showing 5 of 17 publications
Conference Committee Involvement (2)
Airborne Telescope Systems II
27 August 2002 | Waikoloa, Hawai'i, United States
Airborne Telescope Systems
27 March 2000 | Munich, Germany
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