3C-SiC is a large bandgap material with a wide range of applications both in electronics and photonics. Here we demonstrate a low-loss 3C-SiC-on-Oxide (SiCOI) platform over an octave frequency range from visible to near-infrared. A 3C-SiC film is transferred onto an oxide-on-silicon substrate through wafer bonding to form a reliable SiCOI platform suitable for device integration, and the defect-rich transition layer in SiC is removed by chemical mechanical polishing (CMP). With low density of defects and a small root-mean-square (RMS) surface roughness (Rq) of about 1.4 Å in our SiC thin film, we are able to demonstrate record-high intrinsic quality factors of ~250,000 at 1550 nm wavelength and ~85,000 at 770 nm wavelength. Our low-loss SiCOI platform is promising for wideband nonlinear optical applications including second harmonic generation (SHG), four wave mixing (FWM), and Kerr frequency comb.
We demonstrate a hybrid material platform for high-speed integrated optical modulation through integration of graphene with silicon-on-insulator (SOI) substrates after adding a thin layer of an oxide material. The modulation is performed by charge accumulation in the graphene and Si layers of the resulting capacitor to change the index of refraction of both layers (through free-carrier plasma dispersion effect). The advantages of graphene layer include stronger free-carrier plasma dispersion effect, and larger carrier mobility (to achieve smaller device resistance and thus, higher operation speed). We also report solving some of the major challenges in achieving high-quality hybrid platform, especially avoiding the tearing of the graphene layer during the mechanical transfer through adding a layer of hexagonal boron nitride (h-BN) on the two sides of the graphene layer. The h-BN layer also works as an isolation layer to maintain the intrinsic carrier mobility of graphene. We demonstrate reduced graphene resistance by a factor of 3 through h-BN encapsulation. The potential performance measures of the resulting structure along with its extension to double-layer graphene modulators will be discussed. The hybrid graphene modulator has the potential for applications including optical interconnection, optical signal processing, and optical computing.
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