Prof. Heui Jae Pahk Profile

Prof. Heui Jae Pahk

Professor at Seoul National Univ

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Publications (6)

SPIE Journal Paper | 2 January 2014

Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography

Sung-Hoon Park, Tai-Wook Kim, Jeong-Ho Lee, Heui Jae Pahk

JEI, Vol. 23, Issue 01, 013001, (January 2014) https://doi.org/10.1117/12.10.1117/1.JEI.23.1.013001

KEYWORDS: Tomography, Critical dimension metrology, Thin films, Transistors, LCDs, Coherence (optics), Imaging systems, Visibility, Fused deposition modeling, Overlay metrology

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SPIE Journal Paper | 14 September 2012

Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

Nam Thai Doan, Jun-Hee Moon, Tai-Wook Kim, Heui Jae Pahk

JEI, Vol. 21, Issue 3, 033028, (September 2012) https://doi.org/10.1117/12.10.1117/1.JEI.21.3.033028

KEYWORDS: Lawrencium, Reconstruction algorithms, Glasses, Microscopes, Image processing, Imaging systems, Distance measurement, Image restoration, Objectives, Cameras

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Proceedings Article | 16 November 2011 Paper

A new and effective 3D measurement system for micro solder bump

Heui Jae Pahk, Zhu Cheng Li, Jeong-Il Mun

Proceedings Volume 8321, 83212J (2011) https://doi.org/10.1117/12.905072

KEYWORDS: Inspection, Reflectivity, Cameras, Spherical lenses, Polarizers, 3D metrology, Imaging systems, Phase shifting, Motion measurement, Reflection

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Proceedings Article | 21 August 2009 Paper

Comparison of multilayer laser scribing of thin film solar cells with femto, pico, and nanosecond pulse durations

Tai-Wook Kim, Heui-Jae Pahk, Hee Park, David Hwang, Costas Grigoropoulos

Proceedings Volume 7409, 74090A (2009) https://doi.org/10.1117/12.826458

KEYWORDS: Pulsed laser operation, Amorphous silicon, Molybdenum, Copper indium disulfide, Picosecond phenomena, Laser ablation, Femtosecond phenomena, Resistance, Thin film solar cells, Glasses

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Proceedings Article | 31 December 2008 Paper

New method of thin-film thickness measurement in wavelength scanning interferometry

Y. M. Hwang, J. S. Lee, H. J. Pahk

Proceedings Volume 7130, 71300Z (2008) https://doi.org/10.1117/12.819572

KEYWORDS: Wavelet transforms, Thin films, Wavelets, Interferometry, Fourier transforms, Silicon, Silica, Reflectometry, Semiconductors, Phase retrieval

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Proceedings Article | 10 October 2000 Paper

Vision-based precision inspection system for profile and performance of small and micro gears using intelligent image processing techniques and virtual master gears

Heui Jae Pahk, Young Min Hwang, Il Hwan Lee, Woo Jung Ahn

Proceedings Volume 4222, (2000) https://doi.org/10.1117/12.403853

KEYWORDS: Teeth, Inspection, Image processing, Algorithm development, Imaging systems, Cameras, Microscopes, Optical microscopes, Thulium, Precision measurement

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Showing 5 of 6 publications

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