Prof. Heui Jae Pahk
Professor at Seoul National Univ
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | January 2, 2014
JEI Vol. 23 Issue 01
KEYWORDS: Tomography, Critical dimension metrology, Thin films, Transistors, LCDs, Coherence (optics), Imaging systems, Visibility, Fused deposition modeling, Overlay metrology

SPIE Journal Paper | September 14, 2012
JEI Vol. 21 Issue 3
KEYWORDS: Lawrencium, Reconstruction algorithms, Glasses, Microscopes, Image processing, Imaging systems, Distance measurement, Image restoration, Objectives, Cameras

PROCEEDINGS ARTICLE | November 16, 2011
Proc. SPIE. 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Phase shifting, Reflection, Imaging systems, Cameras, Inspection, Reflectivity, Polarizers, 3D metrology, Motion measurement, Spherical lenses

PROCEEDINGS ARTICLE | August 21, 2009
Proc. SPIE. 7409, Thin Film Solar Technology
KEYWORDS: Amorphous silicon, Femtosecond phenomena, Copper indium disulfide, Glasses, Resistance, Laser ablation, Thin film solar cells, Picosecond phenomena, Molybdenum, Pulsed laser operation

PROCEEDINGS ARTICLE | December 31, 2008
Proc. SPIE. 7130, Fourth International Symposium on Precision Mechanical Measurements
KEYWORDS: Semiconductors, Thin films, Wavelet transforms, Silica, Wavelets, Silicon, Fourier transforms, Interferometry, Phase retrieval, Reflectometry

PROCEEDINGS ARTICLE | October 10, 2000
Proc. SPIE. 4222, Process Control and Inspection for Industry
KEYWORDS: Microscopes, Optical microscopes, Teeth, Imaging systems, Cameras, Image processing, Inspection, Precision measurement, Thulium, Algorithm development

Showing 5 of 6 publications
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