Prof. Heui Jae Pahk
Professor at Seoul National Univ
SPIE Involvement:
Publications (6)

SPIE Journal Paper | 2 January 2014
JEI Vol. 23 Issue 01
KEYWORDS: Tomography, Critical dimension metrology, Thin films, Transistors, LCDs, Coherence (optics), Imaging systems, Visibility, Fused deposition modeling, Overlay metrology

SPIE Journal Paper | 14 September 2012
JEI Vol. 21 Issue 3
KEYWORDS: Lawrencium, Reconstruction algorithms, Glasses, Microscopes, Image processing, Imaging systems, Distance measurement, Image restoration, Objectives, Cameras

Proceedings Article | 16 November 2011 Paper
Proc. SPIE. 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Phase shifting, Reflection, Imaging systems, Cameras, Inspection, Reflectivity, Polarizers, 3D metrology, Motion measurement, Spherical lenses

Proceedings Article | 21 August 2009 Paper
Proc. SPIE. 7409, Thin Film Solar Technology
KEYWORDS: Amorphous silicon, Femtosecond phenomena, Copper indium disulfide, Glasses, Resistance, Laser ablation, Thin film solar cells, Picosecond phenomena, Molybdenum, Pulsed laser operation

Proceedings Article | 31 December 2008 Paper
Proc. SPIE. 7130, Fourth International Symposium on Precision Mechanical Measurements
KEYWORDS: Semiconductors, Thin films, Wavelet transforms, Silica, Wavelets, Silicon, Fourier transforms, Interferometry, Phase retrieval, Reflectometry

Showing 5 of 6 publications
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