Hideaki Abe
Chief Specialist at Toshiba Corp
SPIE Involvement:
Publications (18)

Proceedings Article | 28 March 2017 Presentation + Paper
Masafumi Asano, Hideaki Abe, Kazuto Matsuki, Ryoji Yoshikawa, Motofumi Komori, Takashi Hirano, Shinji Mikami, Yongho Kim, Eunhyuk Choi, Woo-Yung Jung
Proceedings Volume 10145, 101450J (2017) https://doi.org/10.1117/12.2258369
KEYWORDS: Inspection, Nanoimprint lithography, Metrology, Lithography, Process control, Scatterometry, Semiconducting wafers, Optical inspection, Scanning electron microscopy, Optical lithography

Proceedings Article | 8 March 2016 Paper
Masafumi Asano, Hirotaka Tsuda, Motofumi Komori, Kazuto Matsuki, Hideaki Abe, Woo-Yung Jung
Proceedings Volume 9778, 977820 (2016) https://doi.org/10.1117/12.2218994
KEYWORDS: Nanoimprint lithography, Critical dimension metrology, Process control, Scatterometry, Etching, Manufacturing, Photoresist processing, Metrology, Image processing, Lithography, Semiconducting wafers, Optical lithography, Control systems, Photomasks

SPIE Journal Paper | 2 October 2014 Open Access
Hideaki Abe, Yasuhiko Ishibashi, Chihiro Ida, Akira Hamaguchi, Takahiro Ikeda, Yuichiro Yamazaki
JM3, Vol. 13, Issue 04, 041405, (October 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.041405
KEYWORDS: Metrology, Scatterometry, X-rays, Nondestructive evaluation, Scattering, Scanning electron microscopy, Semiconducting wafers, Etching, Scatter measurement, Silicon

Proceedings Article | 2 April 2014 Paper
Proceedings Volume 9050, 905034 (2014) https://doi.org/10.1117/12.2048759
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Calibration, Optical testing, Image processing, Metrology, Scatterometry, Image analysis, Data processing, Polarizers

Proceedings Article | 2 April 2014 Paper
Hideaki Abe, Yasuhiko Ishibashi, Chihiro Ida, Akira Hamaguchi, Takahiro Ikeda, Yuichiro Yamazaki
Proceedings Volume 9050, 90501L (2014) https://doi.org/10.1117/12.2048686
KEYWORDS: Metrology, Scatterometry, Nondestructive evaluation, Inspection, Semiconducting wafers, Scattering, Silicon, X-rays, Scatter measurement, Signal detection

Showing 5 of 18 publications
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