Hideaki Hashimoto
at NuFlare Technology Inc
SPIE Involvement:
Publications (10)

Proceedings Article | 28 June 2013 Paper
Hideaki Hashimoto, Nobutaka Kikuiri, Eiji Matsumoto, Hideo Tsuchiya, Riki Ogawa, Ikunao Isomura, Manabu Isobe, Kenichi Takahara
Proceedings Volume 8701, 87010V (2013) https://doi.org/10.1117/12.2029363
KEYWORDS: Inspection, Photomasks, Deep ultraviolet, Optical lithography, Extreme ultraviolet, Image sensors, Sensors, Image transmission, Double patterning technology, Lithography

Proceedings Article | 30 June 2012 Paper
Hideaki Hashimoto, Nobutaka Kikuiri, Ikunao Isomura, Manabu Isobe, Noriaki Musashi
Proceedings Volume 8441, 844117 (2012) https://doi.org/10.1117/12.973655
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Lithography, Current controlled current source, Phase shifts, Laser sources, Laser development, Extreme ultraviolet lithography

Proceedings Article | 29 September 2010 Paper
Proceedings Volume 7823, 782339 (2010) https://doi.org/10.1117/12.866673
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Defect detection, Extreme ultraviolet lithography, Image contrast enhancement, Image enhancement, Lithographic illumination, Image sensors, Light sources

Proceedings Article | 2 April 2010 Paper
Proceedings Volume 7638, 76382Z (2010) https://doi.org/10.1117/12.848679
KEYWORDS: Photomasks, Inspection, Defect detection, Image contrast enhancement, Signal detection, Extreme ultraviolet lithography, Extreme ultraviolet, Image enhancement, Lithography, Image sensors

Proceedings Article | 30 September 2009 Paper
Proceedings Volume 7488, 74882I (2009) https://doi.org/10.1117/12.829748
KEYWORDS: Photomasks, Inspection, Opacity, Defect inspection, Defect detection, Extreme ultraviolet lithography, Semiconducting wafers, Reflectivity, Signal analysis, Scanning electron microscopy

Showing 5 of 10 publications
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