Plasmonic nanograting consisting of thermally-driven Au/SiO2 bimorph beams is developed that modulate birefringence for at the visible wavelength. From electromagnetic field simulation, the phase difference at 650 nm is calculated to be modulated from 68.5 to 23.5 degree by actuating bimorph beams. The phase difference of fabricated modulator was measured at the wavelength range of from 500 to 800 nm with a driving voltage of 10 V. Phase modulation is obtained, and the maximum variation is -3.3 degree at 646 nm. The maximum drive current is 100 mA.
We propose a dew condensation sensor which combines surface plasmon resonance (SPR) and quartz crystal
microbalance (QCM) to measure both refractive index change and mass loading caused by dew condensation
simultaneously. In order to excite SPR and enhance water vapor sorption, a periodic silver nanostructure is fabricated on
an AT-cut quartz crystal oscillator by template deposition. A self-assembled membrane (SAM) which consists of
polystyrene spheres with the diameter of 202 nm was used as the template, and silver thin film with the thickness of 45
nm was deposited on the SAM by vacuum evaporation. Sensitivities of the sensor for detection of dew condensation
were evaluated as the shifts of the SPR extinction peak wavelength and the resonant frequency of quartz crystal. The
sensor is cooled down with the chilling rate of -0.5°C/min in the environment-controlled chamber with relative humidity
and the temperature of 43.2%RH and 25.0°C, respectively. The proposed hybrid sensor was able to measure both the
wavelength shifts of SPR and the additional mass caused by dew condensation simultaneously. Furthermore, the QCM
response of the sensor achieved the sensitivity higher than the under detection limit (3 μg/cm2) of conventional optical
detection method such as chilled mirror surface dew point hygrometer.
Flat panel displays (FPDs) such as liquid crystal or plasma displays require defect free and highly planer substrate panels in its manufacturing processes. Therefore, it is necessary to remove and analyze a killer dust particle on the panel surface in order to improve a problem and feedback to manufacturing process. However, nanometer-sized dust detection is difficult with an optical microscope and polarized light analysis method because of diffraction limit of light wave. Moreover, a detection method with an electron microscope has a problem, because a detection area is limited. This paper describes a large area detection of nanometer-sized dust on the surface of substrate using an evanescent wave illumination. Samples used in the experiment are polystyrene latex beads with diameter of 10μm, 1μm, and 200nm. A CCD camera observed a light scattering from polystyrene latex beads. The position of polystyrene latex bead could be specified from the scattering light image. This result shows that this method is effective for nanometer-sized dust detection in a large area.