Dr. Hideaki Tsubaki
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Polymers, Image processing, Scanners, Coating, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, High volume manufacturing, Fluorine, Photoresist processing, Semiconducting wafers, Research management, Chemically amplified resists

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mechanics, Polymers, Diffusion, Image resolution, Electroluminescence, Bridges, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Photoresist processing, Absorption, Chemically amplified resists

Proceedings Article | 13 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Digital signal processing, Optical lithography, Polymers, Capillaries, Photoresist materials, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist developing

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Optical lithography, Polymers, Diffusion, Surface roughness, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Photoresist processing, Absorption

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Lithography, Electron beam lithography, Contamination, Polymers, Diffusion, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Polymers, Molecules, Diffusion, Amplifiers, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing, Semiconducting wafers

Showing 5 of 18 publications
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