Dr. Hideki Shibata Profile

Dr. Hideki Shibata

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Publications (1)

Proceedings Article | 4 March 2019 Paper

Backside optical I/O module for Si photonics integrated with electrical ICs using fan-out wafer-level packaging technology

Hiroshi Uemura, Kaori Warabi, Kazuya Ohira, Yoichiro Kurita, Hideto Furuyama, Yoshiaki Sugizaki, Hideki Shibata

Proceedings Volume 10924, 1092416 (2019) https://doi.org/10.1117/12.2504855

KEYWORDS: Silicon, Semiconducting wafers, Optical fibers, Photonic integrated circuits, Photonics, Silicon photonics, Wafer-level optics, Wafer bonding, Receivers, Transmitters

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