Hidenori Watanabe
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 23 March 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Light sources, High power lasers, Reliability, Laser applications, Laser development, Ecology, Excimer lasers, Double patterning technology, Immersion lithography

Proceedings Article | 10 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, High power lasers, Reliability, Laser applications, Laser development, Laser stabilization, Excimer lasers, Double patterning technology, Immersion lithography, Pulsed laser operation

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Light sources, Optical amplifiers, Oscillators, High power lasers, Reliability, Laser applications, Excimer lasers, Double patterning technology, Immersion lithography, Fluorine

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Temporal coherence, Lithography, Light sources, Speckle, Spatial coherence, Double patterning technology, Immersion lithography, Critical dimension metrology, Line edge roughness, Laser optics

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Semiconductors, Lithography, Light sources, Electrodes, High power lasers, Laser applications, Molybdenum, Pulsed laser operation, Systems modeling, Laser systems engineering

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Optical amplifiers, Oscillators, Resonators, Luminescence, Laser development, Numerical simulations, Amplifiers, Optical simulations, Pulsed laser operation, Laser systems engineering

Showing 5 of 10 publications
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