Hidetami Yaegashi
Senior Member of Technical Staff
SPIE Involvement:
Publications (56)

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120D (2021) https://doi.org/10.1117/12.2582275
KEYWORDS: Photoresist processing, Polymers, Atomic force microscopy, Visualization, Stochastic processes, Scanning electron microscopy, Materials processing, Chemical elements, Adhesives

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 1132619 (2020) https://doi.org/10.1117/12.2551822
KEYWORDS: Etching, Critical dimension metrology, Extreme ultraviolet, Photomasks, Inspection, Extreme ultraviolet lithography, Logic devices, Stochastic processes

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 113260E (2020) https://doi.org/10.1117/12.2551471
KEYWORDS: Adhesives, Optical lithography, Head-mounted displays, Chemical elements, Etching, Scanning electron microscopy, Extreme ultraviolet lithography

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10957, 109570H (2019) https://doi.org/10.1117/12.2514719
KEYWORDS: Critical dimension metrology, Etching, Metrology, Lithography, Semiconducting wafers, Photoresist processing, Statistical analysis, Optical lithography, Stochastic processes

Proceedings Article | 25 March 2019 Paper
Proceedings Volume 10960, 109601N (2019) https://doi.org/10.1117/12.2514664
KEYWORDS: Etching, Extreme ultraviolet, Optical lithography, Photoresist materials, Logic devices, Defect detection, Extreme ultraviolet lithography, Lithography, Stochastic processes, Line edge roughness

Showing 5 of 56 publications
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