Vertical-Cavity Surface-Emitting Lasers (VCSELs) are very attractive to high power light sources owing to the
advantageous configuration of two-dimensional arrays and being free from catastrophic optical damage. Although oxideconfined
VCSELs have been employed in most of applications with VCSELs, ion-implanted VCSELs have a potential to
be the better light sources for high power applications. In spite of the fact, the detailed characteristics of the ionimplanted
VCSELs had been researched only in ten milliwatt-class output power. Here we report on a high power
VCSEL-array with proton-implanted current apertures. A peak output power of over 40 W under short-pulse operation
has been achieved. This is the first demonstration of ten watt-class output power for ion-implanted VCSELs.