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Dr. Himani S. Kamineni
Graduate Research Assistant at GLOBALFOUNDRIES Inc
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Author
Publications (5)
Proceedings Article | 2 April 2014 Paper
Metrology of white light interferometer for TSV processing
Padraig Timoney, Yeong-Uk Ko, Daniel Fisher, Cheng Kuan Lu, Yudesh Ramnath, Alok Vaid, Sarasvathi Thangaraju, Daniel Smith, Himani Kamineni, Dingyou Zhang, Wonwoo Kim, Ramakanth Alapati, Jonathan Peak, Hemant Amin, Holly Edmunson, Joe Race, Brennan Peterson, Tim Johnson
Proceedings Volume 9050, 90500F (2014) https://doi.org/10.1117/12.2047383
KEYWORDS: Copper, Semiconducting wafers, Interferometers, Metrology, Chemical mechanical planarization, Etching, Optical testing, Critical dimension metrology, Plating, Scanning electron microscopy
Proceedings Article | 15 October 2012 Paper
Study of the effects of structural properties on the photoluminescence behavior of erbium thin films
Himani Kamineni, Spyros Gallis, Mengbing Huang, Alain Kaloyeros
Proceedings Volume 8463, 84630E (2012) https://doi.org/10.1117/12.929987
KEYWORDS: Erbium, Luminescence, Silicon, Oxides, Thin films, Silicon films, Silicates, X-ray diffraction, Annealing, Oxidation
Proceedings Article | 24 September 2011 Paper
Intense blue-white luminescence from amorphous silicon oxycarbide (a-SiCxOy) thin films
Vasileios Nikas, Spyros Gallis, Himani Suhag, Mengbing Huang, Alain Kaloyeros
Proceedings Volume 8123, 812316 (2011) https://doi.org/10.1117/12.891342
KEYWORDS: Luminescence, Silicon, Annealing, Thin films, Visible radiation, Absorption, Argon, Silicon films, Amorphous silicon, Eye
Proceedings Article | 9 September 2008 Paper
A comparative study of a-SiCxOyHz thin films grown via chemical vapor deposition for silicon photonics
Spyros Gallis, Vasileios Nikas, Himani Suhag, Mengbing Huang, Alain Kaloyeros
Proceedings Volume 7039, 70390L (2008) https://doi.org/10.1117/12.795579
KEYWORDS: Annealing, Thin films, Hydrogen, Oxygen, Luminescence, Chemical vapor deposition, Optical properties, Erbium, Silicon, Silicon films
Proceedings Article | 4 September 2008 Paper
Strong photoluminescence at 1540 nm from Er-doped amorphous silicon oxycarbide: a novel silicon material for photonic applications
Spyros Gallis, Vasileios Nikas, Himani Suhag, Mengbing Huang, Alain Kaloyeros
Proceedings Volume 7030, 703004 (2008) https://doi.org/10.1117/12.795560
KEYWORDS: Erbium, Luminescence, Silicon, Annealing, Ions, Silicon photonics, Silica, FT-IR spectroscopy, Amorphous silicon, Thin films
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