Dr. Himani S. Kamineni
Graduate Research Assistant at GLOBALFOUNDRIES Inc
SPIE Involvement:
Publications (5)

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Interferometers, Etching, Copper, Optical testing, Scanning electron microscopy, Plating, Critical dimension metrology, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 15 October 2012
Proc. SPIE. 8463, Nanoengineering: Fabrication, Properties, Optics, and Devices IX
KEYWORDS: Oxides, Thin films, Annealing, Luminescence, X-ray diffraction, Silicon, Silicon films, Erbium, Silicates, Oxidation

Proceedings Article | 24 September 2011
Proc. SPIE. 8123, Eleventh International Conference on Solid State Lighting
KEYWORDS: Amorphous silicon, Thin films, Visible radiation, Eye, Argon, Annealing, Luminescence, Silicon, Silicon films, Absorption

Proceedings Article | 9 September 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Thin films, Optical properties, Annealing, Luminescence, Silicon, Hydrogen, Chemical vapor deposition, Oxygen, Silicon films, Erbium

Proceedings Article | 4 September 2008
Proc. SPIE. 7030, Nanophotonic Materials V
KEYWORDS: Amorphous silicon, Thin films, FT-IR spectroscopy, Silica, Annealing, Luminescence, Ions, Silicon, Erbium, Silicon photonics

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