Dr. Hinderk M. Buss
at SIGMA-C Software AG
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Mathematical modeling, Lithography, Optical lithography, Calibration, Diffusion, Photoresist materials, Differential equations, Finite element methods, Systems modeling, Process modeling

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