Hiroaki Jiroku
at Seiko Epson Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 16, 2003
Proc. SPIE. 5004, Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas
KEYWORDS: Amorphous silicon, Oxides, Laser energy, Annealing, Silicon, Semiconductor lasers, Transmission electron microscopy, Silicon films, Excimer lasers, Thermal oxidation

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