Prof. Hiroaki Kawata
Professor at Osaka Prefecture Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 10 May 2016 Paper
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Nanoimprint lithography, Neodymium, Transmission electron microscopy, Polymethylmethacrylate, Computer simulations, Silicon, Photoresist processing, Finite element methods, Mechanics

Proceedings Article | 28 July 2014 Paper
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Numerical simulations, Light wave propagation, Collimation, Phase shifts

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Optical lithography, Phase shifts, Light wave propagation, Collimation

Proceedings Article | 27 May 2009 Paper
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Silicon, Nanoimprint lithography, Crystals, Motion models, Dry etching, Crystallography, Photomicroscopy, Nanolithography, Mask making, Electron beams

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Lithography, Nickel, Photoresist processing, Quartz, Chromium, Dry etching, Optical lithography, Polymers

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top