Hiroaki Nakarai
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (50)

Proceedings Article | 10 April 2024 Poster + Paper
Fumio Iwamoto, Yoshifumi Ueno, Shinji Nagai, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito
Proceedings Volume 12953, 1295313 (2024) https://doi.org/10.1117/12.3010135
KEYWORDS: Extreme ultraviolet, Tin, Light sources, Inspection, Plasma, Collector mirrors, Plasma generation, Control systems, Laser irradiation, Reliability

Proceedings Article | 21 November 2023 Poster + Paper
Yasutsugu Usami, Yoshifumi Ueno, Shinji Nagai, Fumio Iwamoto, Takuya Ishii, Tsuyoshi Yamada, Hiroaki Nakarai
Proceedings Volume 12751, 1275116 (2023) https://doi.org/10.1117/12.2686231
KEYWORDS: Extreme ultraviolet, Light sources, Inspection, Tin, Extreme ultraviolet lithography, Metrology, Plasma, Collector mirrors, Pellicles, Laser irradiation

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12750, 127500V (2023) https://doi.org/10.1117/12.2686618
KEYWORDS: Extreme ultraviolet, Light sources, Inspection, Laser irradiation, Collector mirrors, Tin, Laser applications, Semiconductors, Reliability, Plasma

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 1249411 (2023) https://doi.org/10.1117/12.2657640
KEYWORDS: Extreme ultraviolet, Tin, Collector mirrors, Laser irradiation, Light sources, Plasma, Ions, Gas lasers, Hydrogen, Control systems

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12292, 122920X (2022) https://doi.org/10.1117/12.2657787
KEYWORDS: Extreme ultraviolet, Mirrors, Deep ultraviolet, Lithography, Light sources, Carbon dioxide lasers, Laser systems engineering, Semiconductors, Photomasks, Inspection

Showing 5 of 50 publications
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