Dr. Hiroaki Oizumi
Deptartment Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (37)

Proceedings Article | 16 May 2017
Proc. SPIE. 10238, High-Power, High-Energy, and High-Intensity Laser Technology III
KEYWORDS: Microscopes, Deep ultraviolet, Glasses, High power lasers, Laser processing, Materials processing, Manufacturing, Laser drilling, Scanning electron microscopy, Laser ablation, Excimer lasers, Micromachining, Laser cutting

Proceedings Article | 22 February 2017
Proc. SPIE. 10097, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VI
KEYWORDS: Deep ultraviolet, Glasses, Annealing, High power lasers, Copper, Laser processing, Materials processing, Reliability, Solid state lasers, Scanning electron microscopy, Infrared lasers, Laser ablation, Excimer lasers, Micromachining, Semiconductor manufacturing

Proceedings Article | 9 November 2016
Proc. SPIE. 10016, High-Power Lasers and Applications VIII
KEYWORDS: Deep ultraviolet, Glasses, High power lasers, Laser processing, Materials processing, Solid state lasers, Heat treatments, Excimer lasers, Pulsed laser operation, Laser bonding

Proceedings Article | 16 March 2016
Proc. SPIE. 9726, Solid State Lasers XXV: Technology and Devices
KEYWORDS: Fiber amplifiers, Optical amplifiers, Deep ultraviolet, High power lasers, Crystals, Solid state lasers, Amplifiers, Excimer lasers, Semiconducting wafers, Laser systems engineering

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Lithography, Electron beams, Metrology, Cadmium, Solid state lighting, Scanning electron microscopy, Photoresist materials, Monte Carlo methods, Solids, Extreme ultraviolet lithography

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Matrices, Glasses, Image processing, Quantum efficiency, Materials processing, Extreme ultraviolet, Chemical analysis, Extreme ultraviolet lithography, Line edge roughness, Chemically amplified resists

Showing 5 of 37 publications
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