Dr. Hiroaki Tsushima
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 1132717 (2020) https://doi.org/10.1117/12.2551845
KEYWORDS: Diffraction gratings, Prisms, Diffraction, Actuators, Light sources, Control systems, Oscillators, Wavefronts, Beam expanders, Excimer lasers

Proceedings Article | 27 March 2019 Paper
Hiroaki Tsushima, Yousuke Fujimaki, Yasuaki Kiyota, Makoto Tanaka, Takashi Itou, Takeshi Asayama, Akihiko Kurosu, Satoshi Tanaka, Takeshi Ohta, Satoru Bushida, Takashi Saitou, Hakaru Mizoguchi
Proceedings Volume 10961, 109610X (2019) https://doi.org/10.1117/12.2515667
KEYWORDS: Electrodes, Excimer lasers, Lithography, Laser applications, Light sources, Semiconductors, Optical lithography, Semiconductor manufacturing, Semiconductor lasers, Laser development

Proceedings Article | 18 March 2019 Presentation
Proceedings Volume 10961, 109610L (2019) https://doi.org/10.1117/12.2515653
KEYWORDS: Immersion lithography, Optical design, Electrodes, Process control, Yield improvement, Manufacturing, Optics manufacturing, Wafer-level optics, Image resolution, Semiconducting wafers

Proceedings Article | 20 March 2018 Presentation + Paper
Hirotaka Miyamoto, Hiroshi Furusato, Keisuke Ishida, Hiroaki Tsushima, Akihiko Kurosu, Hiroshi Tanaka, Takeshi Ohta, Satoru Bushida, Takashi Saito, Hakaru Mizoguchi
Proceedings Volume 10587, 1058710 (2018) https://doi.org/10.1117/12.2297316
KEYWORDS: Diffraction, Actuators, Semiconducting wafers, Diffraction gratings, Laser applications, Electrodes, Oscillators, Immersion lithography, Light sources, Laser stabilization

Proceedings Article | 20 March 2018 Paper
Yousuke Fujimaki, Makoto Tanaka, Takashi Itou, Hirotaka Miyamoto, Miwa Igarashi, Hiroaki Tsushima, Takeshi Asayama, Takahito Kumazaki, Akihiko Kurosu, Takeshi Ohta, Satoru Bushida, Hakaru Mizoguchi
Proceedings Volume 10587, 105871J (2018) https://doi.org/10.1117/12.2297341
KEYWORDS: Electrodes, Excimer lasers, Lithography, Laser applications, Diffraction gratings

Showing 5 of 21 publications
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