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Dr. Hirokazu Yoshino
at Loughborough Univ
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Publications (1)
Proceedings Article | 27 February 2016 Paper
The development of thin film metrology by coherence scanning interferometry
Hirokazu Yoshino, Roger Smith, John Walls, Daniel Mansfield
Proceedings Volume 9749, 97490P (2016) https://doi.org/10.1117/12.2222883
KEYWORDS: Thin films, Refractive index, Interferometry, Metrology, Optical interferometry, Ellipsometry, 3D metrology, Optical testing, Surface roughness, Interfaces, Objectives, Silicon, Radium, Light sources, Silica
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