Dr. Hiroki Sato
at Tohoku Univ
SPIE Involvement:
Publications (5)

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Refractive index, Transparency, Magnesium fluoride, Crystals, Transmittance, Immersion lithography, Laser crystals, Vacuum ultraviolet, Crystallography

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Refractive index, Transparency, Scattering, Annealing, Crystals, Laser induced fluorescence, Transmittance, Excimer lasers, Immersion lithography, Vacuum ultraviolet

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Refractive index, Transparency, Birefringence, Metals, Crystals, Laser induced fluorescence, Transmittance, Immersion lithography, Vacuum ultraviolet, Fluorine

Proceedings Article | 7 June 2005
Proc. SPIE. 5850, Advanced Laser Technologies 2004
KEYWORDS: Mirrors, Prisms, Oscillators, Ultraviolet radiation, Crystals, Nd:YAG lasers, Solid state lasers, Laser crystals, Nonlinear crystals, Pulsed laser operation

Proceedings Article | 8 October 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Refractive index, Reflection, Lenses, Crystals, Laser irradiation, Laser ablation, Transmittance, Laser crystals, Vacuum ultraviolet, Fluorine

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