Hiroki Tanaka
at Kyoto Univ
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 13, 2007
Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI
KEYWORDS: Light sources, Chemical species, Luminescence, Ions, Silicon, Nd:YAG lasers, Laser induced fluorescence, Extreme ultraviolet, Plasma, Tin

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Light sources, Carbon dioxide, Carbon dioxide lasers, Laser ablation, Xenon, Solids, Extreme ultraviolet, Cryogenics, Plasma, Tin

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Light sources, X-rays, Carbon dioxide lasers, CCD cameras, Xenon, Gas lasers, Extreme ultraviolet, YAG lasers, Cryogenics, Plasma

PROCEEDINGS ARTICLE | September 20, 2004
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Light sources, Laser energy, X-rays, Xenon, Gas lasers, Extreme ultraviolet, Carbon monoxide, Cryogenics, Plasma, Tin

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Optical amplifiers, Oscillators, Resonators, Luminescence, Laser development, Numerical simulations, Amplifiers, Optical simulations, Pulsed laser operation, Laser systems engineering

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