Mr. Hiroki Tanaka
at Kyoto Univ
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 13, 2007
Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI
KEYWORDS: Tin, Chemical species, Plasma, Laser induced fluorescence, Silicon, Extreme ultraviolet, Nd:YAG lasers, Ions, Luminescence, Light sources

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Extreme ultraviolet, Carbon dioxide lasers, Plasma, Xenon, Tin, Solids, Light sources, Cryogenics, Laser ablation, Carbon dioxide

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication
KEYWORDS: Extreme ultraviolet, Carbon dioxide lasers, Xenon, Plasma, Light sources, Cryogenics, YAG lasers, Gas lasers, X-rays, CCD cameras

PROCEEDINGS ARTICLE | September 20, 2004
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Gas lasers, Extreme ultraviolet, Xenon, Carbon monoxide, Plasma, Light sources, Cryogenics, Tin, X-rays, Laser energy

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Pulsed laser operation, Oscillators, Optical simulations, Laser systems engineering, Laser development, Amplifiers, Numerical simulations, Optical amplifiers, Resonators, Luminescence

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