Dr. Hiroki Yamamoto
Researcher at National Inst. for Quantum&Radiological Sci.
SPIE Involvement:
Author
Publications (29)

SPIE Journal Paper | 12 December 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Absorption, Photoresist materials, Photons, Extreme ultraviolet, Electrons, Optical lithography, Chemically amplified resists, Extreme ultraviolet lithography, Photoresist developing, Metals

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Polymers, Metals, Photons, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Yield improvement, Photoresist developing, Absorption

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Electron beams, Nanoparticles, Polymers, Metals, Ions, Silver, Absorbance, Picosecond phenomena, Polymer thin films, Absorption

Showing 5 of 29 publications
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