We fabricate ultra-precision mirrors, Osaka Mirror, for synchrotron facilities. In order to fabricate them, it is very important to measure mirror surface precisely. In respect of the importance, we use two kinds of metrology, RADSI and MSI, developed by Osaka University. We have delivered more than 300 mirrors to synchrotron facilities all over the world since 2006 and our mirrors have produced excellent results to many researchers.
As the demand on one meter long mirrors has increased lately, we developed RADSI and MSI systems which are capable in precise measurement of such long mirrors.
Advanced Kirkpatrick-Baez mirror optics using two monolithic imaging mirrors was developed to realize an achromatic, high-resolution, and a high-stability full-field X-ray microscope. The mirror consists of an elliptical section and a hyperbolic section on a quartz glass substrate, in which the geometry follows the Wolter (type I) optics rules. A preliminary test was performed at SPring-8 using X-rays monochromatized to 9.881 keV. A 100-nm feature on a Siemens star chart could be clearly observed.
A surface profiler system with a high accuracy of the order of nanometers has been developed for a half-meter-long X-ray
mirror. This system is based on microstitching interferometer (MSI) and relative angle determinable stitching
interferometer (RADSI). Using elastic hinges and linear actuators, we designed the 5-axis- and 6-axis stages for the MSI
and RADSI, respectively, for the half-meter-long X-ray mirror. A test mirror of length 0.5 m was used to measure the
height accuracy (1.4 nm in rms) and lateral resolution (36 μm) of the proposed system.