Hiromitsu Takase
at EUVA
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Carbon, Mirrors, Data modeling, Molecules, Adsorption, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotron radiation, Information operations, Protactinium

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Carbon, Mirrors, Reflectivity, Bioalcohols, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Carbon, Mirrors, Multilayers, Chemical species, Coating, Bioalcohols, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Carbon, Lithography, Mirrors, Gases, Reflectivity, Adsorption, Extreme ultraviolet, Extreme ultraviolet lithography, Natural surfaces, Protactinium

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Carbon, Mirrors, Reflectivity, Bioalcohols, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Oxides, Mirrors, Silicon, Diffusion, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Protactinium, Oxidation

Showing 5 of 12 publications
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