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Hiroshi Aoki
at Nikon Corp
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Author
Publications (2)
Proceedings Article | 28 May 2014 Paper
Development of portable 3D optical measuring system using structured light projection method
Proceedings Volume 9110, 91100Q (2014) https://doi.org/10.1117/12.2048896
KEYWORDS: Microelectromechanical systems, Mirrors, Projection systems, Cameras, 3D metrology, Calibration, 3D image processing, LCDs, Clouds, Structured light
Proceedings Article | 24 May 2004 Paper
Overlay measurement tool up to 70-nm design rule
Tatsuo Fukui, Hiroshi Aoki, Takeshi Endo, Tomoaki Yamada
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.535007
KEYWORDS: Overlay metrology, Aspheric lenses, Distortion, Semiconducting wafers, Lithography, Monochromatic aberrations, Optical components, Etching, Wavefront aberrations, Manufacturing
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