Dr. Hiroshi Fukuda
SPIE Involvement:
Editorial Board Member: Journal of Micro/Nanolithography, MEMS, and MOEMS | Editorial Board Member: Journal of Micro/Nanopatterning, Materials, and Metrology | Author
Publications (43)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530I (2024) https://doi.org/10.1117/12.3009551
KEYWORDS: Molecular interactions, Line width roughness, Solubility, Molecules, Stochastic processes, Voxels, Photons, Extreme ultraviolet, Dispersion, Spatial frequencies

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 1249403 (2023) https://doi.org/10.1117/12.2655317
KEYWORDS: Stochastic processes, Monte Carlo methods, Voxels, Matrices, Solubility, Principal component analysis, Neural networks, Spatial frequencies, Optical lithography, Inspection, Extreme ultraviolet lithography, Chemically amplified resists, Correlation function

SPIE Journal Paper | 20 July 2022 Open Access
JM3, Vol. 21, Issue 03, 039801, (July 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.3.039801
KEYWORDS: Stochastic processes, Projection lithography, Extreme ultraviolet, Electron beam lithography, Solids, Scattering

SPIE Journal Paper | 20 July 2022 Open Access
JM3, Vol. 21, Issue 03, 039802, (July 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.3.039802
KEYWORDS: Absorption, Stochastic processes, Monte Carlo methods, Extreme ultraviolet lithography, Diffusion, Selenium, Polymers, Molecules, Computer simulations

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12051, PC120510J (2022) https://doi.org/10.1117/12.2610998
KEYWORDS: Principal component analysis, Wave mechanics, Stochastic processes, Optical simulations, Monte Carlo methods, Lithography, Image transmission, Fourier transforms

Showing 5 of 43 publications
Conference Committee Involvement (1)
Optical Microlithography XVI
25 February 2003 | Santa Clara, California, United States
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